Осадження тонких плівок оксиду молібдену для гнучкої біорозкладної електроніки

Анна Сергіївна Гондовська; Роман Ігорович Дідусь; Владислав Анатолійович Лапшуда; Ольга Василівна Ященко

doi:10.20535/2617-0965.eae.227276

Vol. 4 · Issue 1 · 2021 Apr 27, 2026 Microsystems and Physical Electronics

Deposition of Molybdenum Oxide Thin Films for Flexible Biodegradable Electronics

Anna Serhiivna Hondovska National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute” Ukraine

Roman Ihorovych Didus Corresponding National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute” Ukraine

Vladyslav Anatoliiovych Lapshuda National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute” Ukraine

Olha Vasylivna Yashchenko National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute” Ukraine

Pages227276-1 - 227276-6 PublishedApr 27, 2026 LicenseOpen Access

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VOL 4 · ISS 1 · 2021 View issue

Abstract

With its unprecedented properties over conventional rigid platforms, flexible electronics have been a signifi cant research topic in the last decade, offering a broad range of applications from bendable display, flexible solarenergy systems, to soft implantable-devices for health monitoring. Flexible electronics is a disruptive science that requires a high level of multi-disciplinary research, including chemistry, physics, material science, electronic and electrical engineering, mechanical engineering, computing science, biomedical engineering. The deep cross-integrate of it with other key subjects such as artificial intelligence, material science, Internet of things, space science, health science, energy science and data science, breaks through the intrinsic limitations of convention silicon electronics and affords unprecedented opportunities for relative industries involving integrated circuit, new and renewable.

One way to reduce the cost of photoconverters is to use transition metal oxide, which is characterized by better solar energy conversion efficiency. MoO3 is one of the promising candidates due to its nontoxicity, deep electronic state and relative lower vaporization temperature, which can easily deposited in vacuum. In contrast, the other transition metal oxides need relative higher evaporation temperature to deposit the film. The conventional and common fabrication methods for MoO3 are thermal evaporation or sputtering under vacuum. This work presents molybdenum oxide films grown on nano cellulose. Molybdenum oxide thin films were grown by reactive ion beam sputtering on UVN-75R equipment. Measure ments of thin film transparency spectra and the effect of bending on the transparency value were measured using a 4802 UV/VIS Double Beam Spectrophotometer. The energy-dispersion X-ray spectrum showed no impurities. The chemical com position of molybdenum oxide thin films was studied on the basis of energy-dispersion analysis, in which the characteristic X-ray radiation of the sample surface under the action of accelerated electron irradiation was recorded. For this purpose, a scanning electron microscope REM 106U in the mode of elemental microanalysis was used.

The films show high transparency in the visible spectrum, as well as a low influence of bending on the transparency in the ultraviolet spectrum. Bending of the manufactured samples reduces the amount of transparency. Increasing the deposition temperature of the films has the same effect as bending. Combining the excellent electrical properties of MoOx and the high flexibility and transparency of nanocellulose, an excellent replacement for silicon heterostructures has been demon strated.

Keywords

#molybdenum oxide #nanocellulose #flexible electroniсs

References

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C. Battaglia et al., “Hole Selective MoO x Contact for Silicon Solar Cells,” Nano Lett., vol. 14, no. 2, pp. 967–971, Feb. 2014, DOI: https://doi.org/10.1021/nl404389u.
Y. Zhou et al., “High moisture-resistive MoOx/metal/graphite barrier films with excellent thermal dissipation for the encapsulation of organic electronics,” Org. Electron., vol. 86, p. 105817, Nov. 2020, DOI: https://doi.org/10.1016/j.orgel.2020.105817.
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M. Kim, C. Lim, D. Jeong, H.-S. Nam, J. Kim, and J. Lee, “Design of a MoO x /Au/MoO x transparent electrode for high-performance OLEDs,” Org. Electron., vol. 36, pp. 61–67, Sep. 2016, DOI: https://doi.org/10.1016/j.orgel.2016.05.035.

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§ 06 — Related

[1] J. van den Brand et al., “Flexible and stretchable electronics for wearable health devices,” Solid. State. Electron., vol. 113, pp. 116–120, Nov. 2015, DOI: https://doi.org/10.1016/j.sse.2015.05.024.

[2] Y. Zhang et al., “Flexible transparent high-voltage diodes for energy management in wearable electronics,” Nano Energy, vol. 40, pp. 289–299, Oct. 2017, DOI: https://doi.org/10.1016/j.nanoen.2017.08.025.

[3] M.-S. Tsai, P.-G. Su, and C.-J. Lu, “Fabrication of a highly sensitive flexible humidity sensor based on Pt/polythiophene/reduced graphene oxide ternary nanocomposite films using a simple one-pot method,” Sensors Actuators B Chem., vol. 324, p. 128728, Dec. 2020, DOI: https://doi.org/10.1016/j.snb.2020.128728.

[4] H. Jeong, Y. Noh, and D. Lee, “Highly stable and sensitive resistive flexible humidity sensors by means of roll-to-roll printed electrodes and flower-like TiO2 nanostructures,” Ceram. Int., vol. 45, no. 1, pp. 985–992, Jan. 2019, DOI: https://doi.org/10.1016/j.ceramint.2018.09.276.

[5] Y. Zhang et al., “Ultrasensitive flexible NH3 gas sensor based on polyaniline/SrGe4O9 nanocomposite with ppt-level detection ability at room temperature,” Sensors Actuators B Chem., vol. 319, p. 128293, Sep. 2020, DOI: https://doi.org/10.1016/j.snb.2020.128293.

[6] V. A. Barbash, O. V. Yashchenko, and O. A. Vasylieva, “Preparation and Properties of Nanocellulose from Miscanthus x giganteus,” J. Nanomater., vol. 2019, pp. 1–8, Nov. 2019, DOI: https://doi.org/10.1155/2019/3241968.

[7] V. Koval, V. Barbash, M. Dusheyko, V. Lapshuda, O. Yashchenko, and Y. Yakimenko, “Application of Nanocellulose in Humidity Sensors for Biodegradable Electronics,” in 2020 IEEE 10th International Conference Nanomaterials: Applications & Properties (NAP), 2020, pp. 02NS01-1-02NS01-5, DOI: https://doi.org/10.1109/NAP51477.2020.9309598.

[8] N. P. Klochko et al., “Use of biomass for a development of nanocellulose-based biodegradable flexible thin film thermoelectric material,” Sol. Energy, vol. 201, pp. 21–27, May 2020, DOI: https://doi.org/10.1016/j.solener.2020.02.091.

[9] N. Saba and M. Jawaid, “Recent advances in nanocellulose-based polymer nanocomposites,” in Cellulose-Reinforced Nanofibre Composites, Elsevier, 2017, pp. 89–112, DOI: https://doi.org/10.1016/B978-0-08-100957-4.00004-8.

[10] C. Battaglia et al., “Hole Selective MoO x Contact for Silicon Solar Cells,” Nano Lett., vol. 14, no. 2, pp. 967–971, Feb. 2014, DOI: https://doi.org/10.1021/nl404389u.

[11] Y. Zhou et al., “High moisture-resistive MoOx/metal/graphite barrier films with excellent thermal dissipation for the encapsulation of organic electronics,” Org. Electron., vol. 86, p. 105817, Nov. 2020, DOI: https://doi.org/10.1016/j.orgel.2020.105817.

[12] V. Koval et al., “Reactive Ion Beam Sputtered Molybdenum Oxide Thin Films for Optoelectronic Application,” in 2020 IEEE 40th International Conference on Electronics and Nanotechnology (ELNANO), 2020, pp. 246–250, DOI: https://doi.org/10.1109/ELNANO50318.2020.9088736.

[13] M. Kim, C. Lim, D. Jeong, H.-S. Nam, J. Kim, and J. Lee, “Design of a MoO x /Au/MoO x transparent electrode for high-performance OLEDs,” Org. Electron., vol. 36, pp. 61–67, Sep. 2016, DOI: https://doi.org/10.1016/j.orgel.2016.05.035.

Deposition of Molybdenum Oxide Thin Films for Flexible Biodegradable Electronics

Abstract

Keywords

References

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